Exensio AIM Solution

Exensio AIM Solution Webinar

Equipment Trouble Protection (ETP)

On-Demand Webinar

Virtually all semiconductor manufacturers have implemented FDC (Fault Detection and Classification) advanced process control to improve device quality, prevent excursions and reduce manufacturing cost. However, these methods typically require subject matter experts (SMEs) to identify the critical features to extract and control from the FDC sensors. 

By leveraging the advances in big data technologies, artificial intelligence, and machine learning, PDF Solutions has developed a solution that can automatically detect manufacturing process anomalies by looking at the entire time series trace data. The result is an easy-to-use solution for Equipment Trouble Protection (ETP), that requires minimal resources and SMEs to deploy, and delivers a more effective way to safeguard and detect tool and process excursions. 

Webinar attendees will learn:

• How machine learning enables finding equipment trouble before the equipment fails using sensor trade data
• How ETP improves equipment control plans and reduces excursions that cause line yield loss
• How ETP can predict breakdown and equipment events before the tool fails, reducing device scrap and improving preventative maintenance